MPCVD
WEC-MP6000d is an advanced CVD system for growing high quality CVD diamond as monocrystalline & polycrystalline diamond for variety application as below :
• Gem, Lab-grown diamond • Optical components • Shaping & Dressing tools • Cutting tools • Heat spreader • Electrochemical electrodes • Power devices • Electric components • Electron emission device • Sensors, MEMS, etc
Characteristics
Application
• Gem, Lab-grown diamond • Optical components • Shaping & Dressing tools • Cutting tools • Heat spreader • Electrochemical electrodes • Power devices • Electric components • Electron emission device • Sensors, MEMS, etc
Specification
| Microwave Power | 6kW / 2.45GHz |
| Reactor Chamber Material | Stainless Steel |
| Stage Type | Water-cooling |
| Standard Substrate Holder | 50mm (Φ2inch) |
| tandard Gas Channel (up to 6 channels) | 3 channels (H2/CH4/N2) |
| Operating Pressure Range | 10~200 torr |
| Vacuum Leak Integrity (by He leak delector) | < 1x10-9 mbar. l/sec |
| Stage moving | Z-axis |
| Vacuum Pump Type (Standard) | Rotary Vacuum Pump [18/22 m3/h (50/60Hz)] |
| System Dimension (approx.) | W1450xD840xH1950mm |
| System Weight (approx.) | 350kg |
High Purity Grade/Electric grade Diamond
• Laser Cutting (Coring/slicing) solution • Color Identify Solution for CVD diamond • Color Enhance Solution • Polished Diamond Solution